| 12399426 |
Patterned organometallic photoresists and methods of patterning |
Michael Kocsis, Michael Greer, Shu-Hao Chang |
2025-08-26 |
| 12360454 |
Stabilized interfaces of inorganic radiation patterning compositions on substrates |
Brian J. Cardineau, Shu-Hao Chang, Jason K. Stowers, Michael Kocsis |
2025-07-15 |
| 12072626 |
Organometallic radiation patternable coatings with low defectivity and corresponding methods |
Benjamin L. Clark, Gaetano Giordano, Shu-Hao Chang, Dominick Smiddy, Mark Geniza +2 more |
2024-08-27 |
| 11947262 |
Process environment for inorganic resist patterning |
Alan J. Telecky, Jason K. Stowers, Douglas A. Keszler, Stephen T. Meyers, Sonia Castellanos Ortega +2 more |
2024-04-02 |
| 11886116 |
Multiple patterning with organometallic photopatternable layers with intermediate freeze steps |
Jason K. Stowers, Sangyoon Woo, Michael Kocsis, Alan J. Telecky |
2024-01-30 |
| 11480874 |
Patterned organometallic photoresists and methods of patterning |
Michael Kocsis, Michael Greer, Shu-Hao Chang |
2022-10-25 |
| D898598 |
Water proof water sensor |
Ronald B. Roth |
2020-10-13 |
| 10490442 |
Method for blocking a trench portion |
Boon Teik Chan, Ming-Ray Mao, Michael Kocsis |
2019-11-26 |
| 9520298 |
Plasma method for reducing post-lithography line width roughness |
Jean-Francois de Marneffe, Efrain Altamirano Sanchez |
2016-12-13 |