| 10704909 |
MEMS rotation rate sensor including combined driving and detection |
Burkhard Kuhlmann, Mirko Hattass |
2020-07-07 |
| 9453927 |
Sensor structure and yaw rate sensor |
Markus Heitz, Christoph Gauger, Sebastian Gracki |
2016-09-27 |
| 9291455 |
Method for operating and/or for measuring a micromechanical device, and micromechanical device |
Johannes Classen, Christoph Gauger |
2016-03-22 |
| 9266720 |
Hybrid integrated component |
Johannes Classen, Axel Franke, Jens Frey, Heribert Weber, Frank Fischer +2 more |
2016-02-23 |
| 9239339 |
Acceleration sensor and method for operating an acceleration sensor |
Rolf Kaack, Dietrich Schubert, Harald Emmerich |
2016-01-19 |
| 9179555 |
Electrical device having a lubricated joint and a method for lubricating such a joint |
Eric Ochs, Ronny Ludwig, Florian Grabmaier, Stephan Henzler, Rainer Straub +1 more |
2015-11-03 |
| 9040336 |
Method for manufacturing a cap for a MEMS component, and hybrid integrated component having such a cap |
Johannes Classen, Axel Franke, Jens Frey, Heribert Weber, Frank Fischer |
2015-05-26 |
| 8796791 |
Hybrid intergrated component and method for the manufacture thereof |
Axel Franke, Lars Tebje |
2014-08-05 |
| 8336382 |
Acceleration sensor and method for its manufacture |
Johannes Classen, Arnd Kaelberer, Dietrich Schubert, Lars Tebje |
2012-12-25 |
| 7878061 |
Micromechanical system including a suspension and an electrode positioned movably |
Johannes Classen, Arnd Kaelberer, Dietrich Schubert, Lars Tebje |
2011-02-01 |
