Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6286451 | Dome: shape and temperature controlled surfaces | Tetsuya Ishikawa, Hiroji Hanawa | 2001-09-11 |
| 6192829 | Antenna coil assemblies for substrate processing chambers | Michael P. Karazim, Tetsuya Ishikawa, Rudolf Gujer, Thomas Kring, Abhi Desai +2 more | 2001-02-27 |