Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11305982 | Eight spring dual substrate MEMS plate switch and method of manufacture | Christopher S. Gudeman | 2022-04-19 |
| 10011478 | Thermocompression bonding with raised feature | Christopher S. Gudeman | 2018-07-03 |
| 9953787 | Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture | Christopher S. Gudeman, Marin Sigurdson | 2018-04-24 |
| 8808256 | Eye drug delivery system | Stephen R. Beaton, Michael Ferran, Justin Jacobs, Jason Tokarski, Christopher S. Gudeman +2 more | 2014-08-19 |
| 8690830 | In-plane electromagnetic MEMS pump | Gregory A. Carlson, John S. Foster, Christopher S. Gudeman, Steven S. Hovey | 2014-04-08 |
| 8608700 | Microfabicated electromagnetic actuator with push-pull motion | — | 2013-12-17 |
| 8264307 | Dual substrate MEMS plate switch and method of manufacture | John S. Foster, Alok Paranjypye | 2012-09-11 |
| 8245391 | Method of manufacturing a hysteretic MEMS two-dimensional thermal device | — | 2012-08-21 |
| 7944113 | Hysteretic MEMS thermal device and method of manufacture | — | 2011-05-17 |
| 7785913 | System and method for forming moveable features on a composite substrate | John S. Foster, Kimon Rybnicek, Paulo Silveira da Motta | 2010-08-31 |
| 7759152 | MEMS thermal actuator and method of manufacture | Gregory A. Carlson, John S. Foster, Christopher S. Gudeman | 2010-07-20 |
| 7724121 | Singly attached MEMS thermal device and method of manufacture | — | 2010-05-25 |
| 7675162 | Interconnect structure using through wafer vias and method of fabrication | John S. Foster, Steven Hovey, Kimon Rybnicek | 2010-03-09 |
| 7626311 | Hysteretic MEMS two-dimensional thermal device and method of manufacture | — | 2009-12-01 |
| 7622783 | MEMS thermal actuator and method of manufacture | Gregory A. Carlson, John S. Foster, Christopher S. Gudeman | 2009-11-24 |
| 7548145 | Hysteretic MEMS thermal device and method of manufacture | — | 2009-06-16 |
| 7528691 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | Andrew Wallis, John S. Foster, Kimon Rybnicek, Michael Shillinger, Jeffrey F. Summers | 2009-05-05 |
| 7276991 | Multiple switch MEMS structure and method of manufacture | — | 2007-10-02 |
| 7229838 | MEMS actuator and method of manufacture for MEMS particle sorting device | John S. Foster, John C. Harley, Steven Hovey, Richard Martin, Hung D. Nguyen | 2007-06-12 |
| 7220594 | Method and apparatus for sorting particles with a MEMS device | John S. Foster, John C. Harley, Steven Hovey, Richard Martin, Hung D. Nguyen | 2007-05-22 |
| 7210352 | MEMS teeter-totter apparatus with curved beam and method of manufacture | John S. Foster | 2007-05-01 |
| 7141080 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, John S. Foster, Richard Martin, John W. Stocker, Jeffery F. Summers +1 more | 2006-11-28 |
| 7057245 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Jeffery F. Summers, Andrew Wallis, John S. Foster +1 more | 2006-06-06 |
| 6831380 | Low inertia latching microactuator | Tara Jean Rybnicek, John W. Stocker, Jeffery F. Summers, John S. Foster, Richard Martin +1 more | 2004-12-14 |
| 6812061 | Method and apparatus for assembling an array of micro-devices | Patrick Edward Feierabend, Richard Martin, Jeffery F. Summers, Andrew Wallis, John S. Foster +1 more | 2004-11-02 |