Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444277 | Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates | Kam S. Law, Robert Robertson, Marc M. Kollrack, Angela Lee, Dan Maydan | 2002-09-03 |
| 6338874 | Method for multilayer CVD processing in a single chamber | Kam S. Law, Robert Robertson, Marc M. Kollrack, Angela Lee, Dan Maydan | 2002-01-15 |
| 5399387 | Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates | Kam S. Law, Robert Robertson, Marc M. Kollrack, Angela Lee, Dan Maydan | 1995-03-21 |