Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869021 | Showerhead apparatus for a linear batch chemical vapor deposition system | Piero Sferlazzo, Dennis R. Stucky, Darren M. Simonelli, Matthew C. Farrell, Robert P. Couilliard | 2018-01-16 |
| 6368404 | Induction heated chemical vapor deposition reactor | Alexander I. Gurary, David Russell Voorhees, Scott Beherrell | 2002-04-09 |