Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484229 | Device and method for processing wafer-shaped articles | Christian AUFEGGER, Reinhold SCHWARZENBACHER | 2016-11-01 |
| 9190310 | Grounded chuck | Michael Brugger | 2015-11-17 |
| 9147593 | Apparatus for liquid treatment of wafer shaped articles | Stephan Hoffmann | 2015-09-29 |
| 9130002 | Device for holding wafer shaped articles | Dieter Frank, Michael PUGGL, Roman Fuchs | 2015-09-08 |
| 9093482 | Method and apparatus for liquid treatment of wafer shaped articles | Michael Brugger, Olivier Postel | 2015-07-28 |
| 8613288 | High temperature chuck and method of using same | Michael Brugger | 2013-12-24 |
| 8608146 | Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin | Michael Brugger, Dietmar Hammer | 2013-12-17 |