Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335626 | Mask design and decomposition for sidewall image transfer | Lars Liebmann | 2016-05-10 |
| 8716133 | Three photomask sidewall image transfer method | Shyng-Tsong Chen, Ryan O. Jung, Yunpeng Yin | 2014-05-06 |