Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7737707 | Sheet-like probe, method of producing the probe, and application of the probe | Katsumi Sato, Kazuo Inoue, Hitoshi Fujiyama, Hisao Igarashi | 2010-06-15 |
| 7671609 | Sheet-like probe, method of producing the probe, and application of the probe | Katsumi Sato, Kazuo Inoue, Hitoshi Fujiyama, Hisao Igarashi | 2010-03-02 |
| 7656176 | Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment | Hitoshi Fujiyama, Hisao Igarashi | 2010-02-02 |
| 7297360 | Insulation film | Eiji Hayashi, Kouji Sumiya, Atsushi Shiota | 2007-11-20 |
| 7189651 | Stopper for chemical mechanical planarization, method for manufacturing same, and chemical mechanical planarization method | Eiji Hayashi, Norihiko Ikeda | 2007-03-13 |
| 6890605 | Method of film formation, insulating film, and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Matthias Patz, Atsushi Shiota, Kinji Yamada | 2005-05-10 |
| 6645881 | Method of forming coating film, method of manufacturing semiconductor device and coating solution | Nobuhide Yamada, Rempei Nakata, Makoto Sugiura, Takahiro Kitano, Shinji Kobayashi | 2003-11-11 |