Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515177 | Circulating EFEM | Hiroshi Igarashi, Tsutomu Okabe | 2022-11-29 |
| 11135623 | Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method | Tatsuhiro KOTSUGAI | 2021-10-05 |
| 11049736 | Circulating EFEM | Hiroshi Igarashi, Tsutomu Okabe | 2021-06-29 |
| 9833817 | Gas purge unit, load port apparatus, and installation stand for purging container | Jun Emoto, Hiroshi Igarashi | 2017-12-05 |
| 9786531 | Gas purge unit, load port apparatus, and installation stand for purging container | Jun Emoto, Hiroshi Igarashi | 2017-10-10 |
| 9324595 | Load port apparatus and method of detecting object to be processed | Hiroshi Igarashi, Tomoshi Abe | 2016-04-26 |
| 8485771 | Load port apparatus and dust exhaust method for load port apparatus | Hitoshi Suzuki, Koichiro Oikawa | 2013-07-16 |
| 8251636 | Lid closing method for closed container and lid opening/closing system for closed container | Toshihiko Miyajima | 2012-08-28 |
| 7379174 | Wafer detecting device | Toshihiko Miyajima, Tsutomu Okabe | 2008-05-27 |
| 7360346 | Purging system and purging method for the interior of a portable type hermetically sealed container | Toshihiko Miyajima, Takeshi Kagaya, Hitoshi Suzuki | 2008-04-22 |