Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8278616 | Position detector and exposure apparatus | — | 2012-10-02 |
| 7898119 | Planar motor and stage using the same | — | 2011-03-01 |
| 7772727 | Planar pulse motor, exposure apparatus, and device manufacturing method | — | 2010-08-10 |
| 7551264 | Exposure apparatus | — | 2009-06-23 |
| 7245349 | Exposure apparatus | — | 2007-07-17 |
| 7228339 | Information storage output system and information storage output service | Hiroshi Yamamoto, Hiroshi Yamaguchi, Tsunehiro Motegi, Katsuo Shioiri, Hirofumi Harada +1 more | 2007-06-05 |
| 7079222 | Exposure apparatus | — | 2006-07-18 |
| 7050153 | Exposure apparatus | — | 2006-05-23 |
| 7009683 | Exposure apparatus | — | 2006-03-07 |
| 6888618 | Exposure apparatus and exposure method | — | 2005-05-03 |
| 6862079 | Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility | — | 2005-03-01 |
| 6771353 | Exposure apparatus and method, device manufacturing method, and discharge lamp | — | 2004-08-03 |
| 6369876 | Exposure apparatus and method, device manufacturing method, and discharge lamp | — | 2002-04-09 |
| 6166505 | Interlocking apparatus | — | 2000-12-26 |
| 5753926 | Scan type exposure apparatus and method having a reference plate with marks for image detection | — | 1998-05-19 |
| 5608492 | Scanning type exposure apparatus and method and device manufacturing method | — | 1997-03-04 |
| 4934064 | Alignment method in a wafer prober | Nobuhito Yamaguchi, Takao Ukaji, Taro Ohmori, Eiichi Murakami | 1990-06-19 |
| 4929893 | Wafer prober | Takao Ukaji, Nobuhito Yamaguchi, Taro Ohmori, Eiichi Murakami | 1990-05-29 |
| 4870288 | Alignment method | Yuji Abuku | 1989-09-26 |
| 4864227 | Wafer prober | — | 1989-09-05 |
| 4789294 | Wafer handling apparatus and method | Shunzo Imai, Ryozo Hiraga | 1988-12-06 |
| 4755747 | Wafer prober and a probe card to be used therewith | — | 1988-07-05 |
| 4747608 | Wafer chuck | Nobuyoshi Deguchi, Shunzo Imai | 1988-05-31 |
| 4677474 | Wafer prober | Bunei Hamasaki | 1987-06-30 |
| 4659227 | Alignment apparatus | Minoru Yomoda | 1987-04-21 |