Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237151 | Apparatus and method for processing substrate using plasma | Seong Gil LEE, Young Je UM, Myoung Sub NOH, Dong Sub Oh, Dong-Hun Kim +1 more | 2025-02-25 |
| 12176185 | Apparatus and method for processing substrate using plasma | Jae Hoo Lee, Yoon Jong Ju, Wan Jae Park | 2024-12-24 |
| 11978654 | Substrate processing apparatus | Wan Jae Park, Yoon Jong Ju, Jaehoo Lee | 2024-05-07 |
| 11167326 | Substrate processing apparatus and nozzle unit | Doyeon KIM, Jinkyu Kim, Yoon Jong Ju | 2021-11-09 |
| 10964557 | Substrate processing apparatus and substrate processing method | Do Yeon Kim, Jin Kyu Kim, Yoon Jong Ju, Joon Ho WON, Yong Tak Hyun | 2021-03-30 |
| 10197333 | Method and apparatus for drying substrate | Boong Kim, Joo Jib Park, Woo Young Kim | 2019-02-05 |