Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5935768 | Method of processing a substrate in a photolithography system utilizing a thermal process module | H. Alexander Anderson | 1999-08-10 |
| 5766824 | Method and apparatus for curing photoresist | William T. Batchelder, Michael L. Parodi | 1998-06-16 |
| 5651823 | Clustered photolithography system | Michael L. Parodi, H. Alexander Anderson, Alexander Lurye | 1997-07-29 |
| 5553994 | Thermal process module for substrate coat/develop system | H. Alexander Anderson | 1996-09-10 |
| 5443348 | Cassette input/output unit for semiconductor processing system | Alexander Lurye | 1995-08-22 |
| 4698775 | Self-contained mobile reprogrammable automation device | George R. Koch, Michael Krolak | 1987-10-06 |
| 4654573 | Power transfer device | J. Kirkwood H. Rough, Michael Krolak | 1987-03-31 |
| 4615615 | Laser positioning system | Michael Krolak | 1986-10-07 |
| 4402623 | Apparatus for dynamically adjusting paper tension in a linear manner | Gideon W. Baxter | 1983-09-06 |