Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322571 | Multi-state RF pulsing to control mask shape and breaking selectivity versus process margin trade-off | Nikhil Dole, Vikhram Vilasur Swaminathan, Beibei Jiang | 2025-06-03 |
| 12278112 | Multiple state pulsing for high aspect ratio etch | Aniruddha Joi, Nikhil Dole, Eric A. Hudson, Jay Sheth | 2025-04-15 |
| 12217972 | Multi-state pulsing for achieving a balance between bow control and mask selectivity | Nikhil Dole, Eric A. Hudson, Sangheon Lee, Xiaoqiang Yao | 2025-02-04 |
| 10431458 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Hyunjong Shim | 2019-10-01 |
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Hyunjong Shim | 2017-01-10 |