Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431458 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Merrett Wong | 2019-10-01 |
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Merrett Wong | 2017-01-10 |