Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052885 | Structural modification using electron beam activated chemical etch | Garrett Pickard, Rudy F. Garcia, Ming Lun Yu, Kenneth Krzeczowski, Matthew Lent +3 more | 2011-11-08 |
| 7879730 | Etch selectivity enhancement in electron beam activated chemical etch | Garrett Pickard, Rudy F. Garcia, Tzu-Chin Chuang, Ming Lun Yu, Kenneth Krzeczowski +4 more | 2011-02-01 |
| 7709792 | Three-dimensional imaging using electron beam activated chemical etch | Tzu-Chin Chuang, Kenneth Krzeczowski, Matthew Lent, Chris Huang, Stanislaw Marek Borowicz | 2010-05-04 |
| 6843927 | Method and apparatus for endpoint detection in electron beam assisted etching | — | 2005-01-18 |