| D1052546 |
Cover ring of top plate for semiconductor manufacturing apparatus |
Takuto Umetsu, Kunihiko Suzuki |
2024-11-26 |
| D1016761 |
Top plate for semiconductor manufacturaing equipment |
Takuto Umetsu, Kunihiko Suzuki |
2024-03-05 |
| 10745824 |
Film forming apparatus |
Kunihiko Suzuki, Naohisa Ikeya, Kazukuni Hara, Hiroaki Fujibayashi, Hideki Matsuura +1 more |
2020-08-18 |
| 10316429 |
Film forming apparatus and film forming method |
Shinya Higashi, Kaori Deura, Kunihiko Suzuki |
2019-06-11 |
| 9552983 |
Manufacturing method for semiconductor device |
Hironobu Hirata, Yoshikazu Moriyama |
2017-01-24 |
| 8524103 |
Method for manufacturing susceptor |
Hideki Arai, Kunihiko Suzuki |
2013-09-03 |
| 7967912 |
Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device |
Kunihiko Suzuki |
2011-06-28 |
| 7923355 |
Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device |
Yoshikazu Moriyama |
2011-04-12 |