Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552983 | Manufacturing method for semiconductor device | Masayoshi Yajima, Yoshikazu Moriyama | 2017-01-24 |
| 9090990 | Manufacturing apparatus and method for semiconductor device | Kunihiko Suzuki | 2015-07-28 |
| 8795435 | Susceptor, coating apparatus and coating method using the susceptor | Shinya Higashi | 2014-08-05 |
| 8632634 | Coating apparatus and coating method | Yoshikazu Moriyama, Kunihiko Suzuki | 2014-01-21 |
| 8597429 | Manufacturing apparatus and method for semiconductor device | Kunihiko Suzuki | 2013-12-03 |
| 8460470 | Vapor phase deposition apparatus and support table | Akira Jyogo, Yoshikazu Moriyama | 2013-06-11 |
| 8257499 | Vapor phase deposition apparatus and vapor phase deposition method | Kunihiko Suzuki, Hideki Arai | 2012-09-04 |
| 7699604 | Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device | Hideki Ito, Shinichi Mitani | 2010-04-20 |
| 5984764 | Method of dressing an abrasive cloth and apparatus therefor | Hideo Saito, Hiromi Nishihara, Fumitaka Ito | 1999-11-16 |