Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619261 | Manufacturing method for electronic component | Daisuke Hironiwa, Takashi Kurimoto | 2020-04-14 |
| 9466475 | Ashing device | Takashi Kurimoto, Kyuzo Nakamura, Koukou Suu, Toshiya Yogo, Kazushige Komatsu +1 more | 2016-10-11 |
| 9305752 | Method for operating substrate processing apparatus | Yutaka Kokaze, Yoshiaki Yoshida | 2016-04-05 |
| 9059105 | Ashing apparatus | Takashi Kurimoto, Michio Ishikawa, Koukou Suu, Toshiya Yogo | 2015-06-16 |
| 8133325 | Dry cleaning method for plasma processing apparatus | Yutaka Kokaze, Mitsuhiro Endou, Koukou Suu | 2012-03-13 |
| 6495413 | Structure for masking integrated capacitors of particular utility for ferroelectric memory integrated circuits | Shan Sun, George Hickert, Diana Johnson, John Ortega, Eric Dale | 2002-12-17 |