Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9941133 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2018-04-10 |
| 9915928 | Availability prediction apparatus for electric power storage device | Akira Ito, Junichirou Kanamori, Mitsuru Fujita, Tatsuya Suzuki, Shinkichi Inagaki +1 more | 2018-03-13 |
| 9597975 | Power supply system | Akira Ito, Junichirou Kanamori, Mitsuru Fujita, Tatsuya Suzuki, Shinkichi Inagaki +1 more | 2017-03-21 |
| 9496147 | Plasma processing apparatus and plasma processing method | Motohiro Tanaka | 2016-11-15 |
| 8557709 | Plasma processing apparatus and plasma processing method | Motohiro Tanaka | 2013-10-15 |
| 8236701 | Plasma processing apparatus and plasma processing method | Motohiro Tanaka, Kousa Hirota | 2012-08-07 |
| 7771608 | Plasma processing method and apparatus | Tsutomu Iida | 2010-08-10 |
| 7615132 | Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method | Naoki Yasui, Seiichi Watanabe, Hitoshi Tamura | 2009-11-10 |
| 7585776 | Dry etching method of insulating film | Nobuyuki Negishi, Masatoshi Oyama | 2009-09-08 |
| 7373899 | Plasma processing apparatus using active matching | Naoki Yasui, Seiichi Watanabe, Hitoshi Tamura | 2008-05-20 |
| 7169255 | Plasma processing apparatus | Naoki Yasui, Hitoshi Tamura, Seiichi Watanabe | 2007-01-30 |
| 7029594 | Plasma processing method | Naoki Yasui, Hitoshi Tamura, Seiichi Watanabe | 2006-04-18 |
| 6875366 | Plasma processing apparatus and method with controlled biasing functions | Naoki Yasui, Seiichi Watanabe | 2005-04-05 |
| 6806201 | Plasma processing apparatus and method using active matching | Naoki Yasui, Seiichi Watanabe, Hitoshi Tamura | 2004-10-19 |
| 6777037 | Plasma processing method and apparatus | Hitoshi Tamura, Seiichi Watanabe | 2004-08-17 |
| 5886473 | Surface wave plasma processing apparatus | Seiichi Watanabe, Muneo Furuse, Hitoshi Tamura | 1999-03-23 |