Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1066620 | Patterned heater pedestal with groove extensions | — | 2025-03-11 |
| 12110585 | Process chamber and exhaust liner system therefor | Naman Apurva, Lara Hawrylchak, Sriharish Srinivasan, Prashant Agarwal | 2024-10-08 |
| D1035598 | Gas distribution plate for a semiconductor processing chamber | Yury Shustrov | 2024-07-16 |
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Christopher Dao +2 more | 2020-09-01 |
| D884855 | Heater pedestal | Naman Apurva | 2020-05-19 |