Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094740 | Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology | Manoj A. Gajendra, Joseph Antony Jonathan, Jamie Stuart Leighton | 2024-09-17 |
| 11551942 | Methods and apparatus for cleaning a substrate after processing | Manoj A. Gajendra, Kyle M. Hanson, Arvind Thiyagarajan, Jon C. Farr | 2023-01-10 |
| 9799548 | Susceptors for enhanced process uniformity and reduced substrate slippage | Gangadhar Sheelavant, Yuji Aoki | 2017-10-24 |