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Product including a silicon-containing functional layer and an insulating layer made of silicon dioxide, and method fabricating the product |
Stephan Pindl |
2002-06-25 |
| 6389086 |
Digital circuit having a filter unit for suppressing glitches |
Thoai-Thai Le, Eckhard Brass |
2002-05-14 |
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Micromechanical component |
— |
1999-08-17 |
| 5913115 |
Method for producing a CMOS circuit |
Udo Schwalke, Herbert Schaefer, Dirk Schumann |
1999-06-15 |
| 5911157 |
Tunnel effect sensor |
— |
1999-06-08 |
| 5877421 |
Acceleration sensor |
Ulrich Naeher, Christofer Hierold, Max Steger |
1999-03-02 |
| 5834332 |
Micromechanical semiconductor components and manufacturing method therefor |
Christofer Hierold, Thomas Scheiter, Helmut Klose |
1998-11-10 |
| 5760455 |
Micromechanical semiconductor component and manufacturing method therefor |
Christofer Hierold, Thomas Scheiter, Helmut Klose |
1998-06-02 |
| 5753134 |
Method for producing a layer with reduced mechanical stresses |
— |
1998-05-19 |
| 5700702 |
Method for manufacturing an acceleration sensor |
Helmut Klose, Thomas Scheiter, Christofer Hierold |
1997-12-23 |
| 5700379 |
Method for drying micromechanical components |
— |
1997-12-23 |
| 5472916 |
Method for manufacturing tunnel-effect sensors |
Emmerich Bertagnolli |
1995-12-05 |
| 5450754 |
Pressure sensor |
Thomas Scheiter, Helmut Klose |
1995-09-19 |
| 5447067 |
Acceleration sensor and method for manufacturing same |
Thomas Scheiter, Helmut Klose |
1995-09-05 |
| 5431051 |
Tunnel effect acceleration sensor |
Thomas Scheiter, Helmut Klose |
1995-07-11 |
| 5373181 |
Sensor for sensing fingerpaints and method for producing the sensor |
Thomas Scheiter, Helmut Klose |
1994-12-13 |
