Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5877421 | Acceleration sensor | Markus Biebl, Christofer Hierold, Max Steger | 1999-03-02 |
| 5698112 | Corrosion protection for micromechanical metal layers | Emmerich Bertagnolli | 1997-12-16 |
| 5662772 | Method for the selective removal of silicon dioxide | Thomas Scheiter, Christofer Hierold | 1997-09-02 |