Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176200 | Laser-driven light source with electrodeless ignition | Matthew Partlow, Donald K. Smith, Akinori Asai | 2024-12-24 |
| 12156322 | Inductively coupled plasma light source with switched power supply | Frederick Marvin Niell, III, Donald K. Smith, Stephen F. Horne, David B. Reisman, Daniel J. Arcaro +1 more | 2024-11-26 |
| 12144072 | All-optical laser-driven light source with electrodeless ignition | Matthew Partlow, Donald K. Smith, Akinori Asai | 2024-11-12 |
| 12014918 | Laser-driven light source with electrodeless ignition | Matthew Partlow, Donald K. Smith, Akinori Asai | 2024-06-18 |
| 11784037 | Laser-driven light source with electrodeless ignition | Matthew Partlow, Donald K. Smith, Akinori Asai | 2023-10-10 |
| 11587781 | Laser-driven light source with electrodeless ignition | Matthew Partlow, Donald K. Smith, Akinori Asai | 2023-02-21 |
| 11183356 | Rotary anode unit and X-ray generation apparatus | Ryosuke Yabushita | 2021-11-23 |
| 11164713 | X-ray generation apparatus | Ryosuke Yabushita | 2021-11-02 |
| 8525138 | Laser-driven light source | Donald K. Smith, Huiling Zhu, Daniil Stolyarov, Hongke Ye, Gordon Hill +1 more | 2013-09-03 |
| 8173986 | Laser-heated infrared source | William M. Holber, Donald K. Smith, Stephen F. Horne, Paul A. Blackborow | 2012-05-08 |
| 8143790 | Method for inductively-driven plasma light source | Donald K. Smith, Stephen F. Horne, Paul A. Blackborow | 2012-03-27 |
| 7948185 | Inductively-driven plasma light source | Donald K. Smith, Stephen F. Horne, Paul A. Blackborow, Ron Collins | 2011-05-24 |
| 7829353 | Pulsed mass flow delivery system and method | Ali Shajii, Siddharth P. Nagarkatti, William R. Clark, Daniel Smith, Bora Akgerman | 2010-11-09 |
| 7659489 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Andrew Cowe, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2010-02-09 |
| 7628860 | Pulsed mass flow delivery system and method | Ali Shajii, Siddharth P. Nagarkatti, William R. Clark, Daniel Smith, Bora Akgerman | 2009-12-08 |
| 7615120 | Pulsed mass flow delivery system and method | Ali Shajii, Siddharth P. Nagarkatti, William R. Clark, Daniel Smith, Bora Akgerman | 2009-11-10 |
| 7569791 | Inductively-driven plasma light source | Donald K. Smith, Raghuram L. V Petluri | 2009-08-04 |
| 7501600 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Andrew Cowe, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2009-03-10 |
| 7307375 | Inductively-driven plasma light source | Donald K. Smith, Stephen F. Horne, Paul A. Blackborow | 2007-12-11 |
| 7238266 | Method and apparatus for fluorine generation and recirculation | Donald K. Smith, William M. Holber, Stephen F. Horne | 2007-07-03 |
| 7199384 | Inductively-driven light source for lithography | Donald K. Smith, Stephen F. Horne, Paul A. Blackborow | 2007-04-03 |
| 7183717 | Inductively-driven light source for microscopy | Donald K. Smith, Stephen F. Horne, Paul A. Blackborow | 2007-02-27 |
| 7073771 | Porous valve assembly | Ali Shajii, Ronald W. Collins, Jr. | 2006-07-11 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | William M. Holber, Xing Chen, Andrew Cowe, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2005-03-29 |
| 6781119 | Ion storage system | Donald K. Smith, Stephen F. Horne | 2004-08-24 |