Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681213 | EUV pattern transfer using graded hardmask | Nelson Felix, Ashim Dutta, Ekmini Anuja De Silva | 2023-06-20 |
| 11300881 | Line break repairing layer for extreme ultraviolet patterning stacks | Jing Guo, Nelson Felix, Ekmini Anuja De Silva | 2022-04-12 |
| 10879107 | Method of forming barrier free contact for metal interconnects | Ashim Dutta, Ekmini Anuja De Silva, Jennifer Church | 2020-12-29 |
| 10615037 | Tone reversal during EUV pattern transfer using surface active layer assisted selective deposition | Ashim Dutta, Ekmini Anuja De Silva | 2020-04-07 |
| 10578981 | Post-lithography defect inspection using an e-beam inspection tool | Ekmini Anuja De Silva, Yasir Sulehria, Nelson Felix | 2020-03-03 |
| 10539884 | Post-lithography defect inspection using an e-beam inspection tool | Ashim Dutta, Ekmini Anuja De Silva | 2020-01-21 |
| 10281826 | Determination of lithography effective dose uniformity | Daniel A. Corliss, Christopher F. Robinson | 2019-05-07 |
| 10274836 | Determination of lithography effective dose uniformity | Daniel A. Corliss, Christopher F. Robinson | 2019-04-30 |