Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121711 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Sipeng Gu, Xiang Hu, Alok Vaid, Akshey Sehgal | 2018-11-06 |
| 9281249 | Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure | Alok Vaid, Abner Bello, Sipeng Gu, Xiang Hu, Akshey Sehgal | 2016-03-08 |
| 9177873 | Systems and methods for fabricating semiconductor device structures | Alok Vaid, Carsten Hartig | 2015-11-03 |
| 9129905 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Xiang Hu, Alok Vaid, Sipeng Gu, Akshey Sehgal | 2015-09-08 |
| 9121890 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Sipeng Gu, Xiang Hu, Alok Vaid, Akshey Sehgal | 2015-09-01 |