Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9099353 | Method and system for determining overlap process windows in semiconductors by inspection techniques | — | 2015-08-04 |
| 8940555 | Method and system for determining overlap process windows in semiconductors by inspection techniques | — | 2015-01-27 |
| 7465522 | Photolithographic mask having half tone main features and perpendicular half tone assist features | Gerhard Kunkel, Hermann Sachse, Helmut Wurzer | 2008-12-16 |
| 7084962 | Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer | Stefan Gruss, Ansgar Teipel, Hans-Georg Froehlich | 2006-08-01 |
| 7078133 | Photolithographic mask | Robert Feurle, Ina Voigt, Helmut Wurzer | 2006-07-18 |
| 6737748 | Stacked via with specially designed landing pad for integrated semiconductor structures | Thomas Zell, Matthias Lehr, Albrecht Kieslich | 2004-05-18 |