Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7251016 | Method for correcting structure-size-dependent positioning errors in photolithography | Hans-Georg Froehlich, Manuel Vorwerk | 2007-07-31 |
| 7084962 | Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer | Lothar Bauch, Stefan Gruss, Hans-Georg Froehlich | 2006-08-01 |