Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7425396 | Method for reducing an overlay error and measurement mark for carrying out the same | Stefan Gruss, Detlef Hofmann, Rainer Pforr, Mario Hennig, Guido Thielscher | 2008-09-16 |
| 7251016 | Method for correcting structure-size-dependent positioning errors in photolithography | Manuel Vorwerk, Ansgar Teipel | 2007-07-31 |
| 7084962 | Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer | Lothar Bauch, Stefan Gruss, Ansgar Teipel | 2006-08-01 |
| 5445544 | Wire end ferrule | Bruno Weiland, Herbert Leonhardt, deceased, Claus Geier | 1995-08-29 |