Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7425396 | Method for reducing an overlay error and measurement mark for carrying out the same | Stefan Gruss, Detlef Hofmann, Rainer Pforr, Mario Hennig, Hans-Georg Froehlich | 2008-09-16 |