Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7618867 | Method of forming a doped portion of a semiconductor and method of forming a transistor | Tobias Mono, Frank Jakubowski, Lars Voelkel, Klaus-Dieter Morhard, Dietmar Henke | 2009-11-17 |
| 7465522 | Photolithographic mask having half tone main features and perpendicular half tone assist features | Lothar Bauch, Gerhard Kunkel, Helmut Wurzer | 2008-12-16 |
| 6849364 | Mask for fabricating semiconductor components | Albrecht Kieslich | 2005-02-01 |
| 6753236 | Method for planarizing an isolating layer | Klaus Feldner, Werner Graf, Albrecht Kieslich | 2004-06-22 |