Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107693 | Method for high aspect ratio photoresist removal in pure reducing plasma | Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu +2 more | 2021-08-31 |
| 10431469 | Method for high aspect ratio photoresist removal in pure reducing plasma | Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris, HaiAu PhanVu +2 more | 2019-10-01 |
| 9396963 | Mask removal process strategy for vertical NAND device | HaiAu PhanVu, Vijay M. Vaniapura | 2016-07-19 |
| 8093157 | Advanced processing technique and system for preserving tungsten in a device structure | Songlin Xu | 2012-01-10 |