Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107693 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, James Paris, HaiAu PhanVu +2 more | 2021-08-31 |
| 10431469 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, James Paris, HaiAu PhanVu +2 more | 2019-10-01 |
| 6667244 | Method for etching sidewall polymer and other residues from the surface of semiconductor devices | Gerald M. Cox, John Kevin Donoghue, Kristel Van Baekel | 2003-12-23 |