Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107693 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more | 2021-08-31 |
| 10431469 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more | 2019-10-01 |
| 9396963 | Mask removal process strategy for vertical NAND device | Li Diao, Vijay M. Vaniapura | 2016-07-19 |