Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360466 | Maintenance of modules for light sources used in semiconductor photolithography | Russell Allen Burdt, Matthew Minakais, David Wesley Manley | 2025-07-15 |
| 9449788 | Enhanced defect detection in electron beam inspection and review | Gary Fan, Wade Lenn Jensen, Hong Xiao, Lorraine Ellen Young | 2016-09-20 |