Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318363 | Substrate processing system and substrate position correction method | Takamasa Chikuma, Keiji Osada, Chunmui Li | 2016-04-19 |
| 9070728 | Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system | Kenichi Kobayashi, Youichi Nakayama, Kenji Shirasaka | 2015-06-30 |
| 5088697 | Heat treating apparatus | Seishi Murakami, Susumu Kato | 1992-02-18 |