Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8469342 | Substrate suction apparatus and method for manufacturing the same | Yoshiaki Tatsumi | 2013-06-25 |
| 8238072 | Bipolar electrostatic chuck | Hiroshi Fujisawa | 2012-08-07 |
| 8196594 | Apparatus for removing foreign material from substrate and method for removing foreign material from substrate | Riichiro Harano, Yoshiaki Tatsumi, Hiroshi Fujisawa | 2012-06-12 |
| 8158238 | Electrostatic chuck and electrode sheet for electrostatic chuck | Hiroshi Fujisawa, Riichiro Harano | 2012-04-17 |
| 8051548 | Method of manufacturing an electrostatic chuck | Yoshihiro Watanabe | 2011-11-08 |
| 8027171 | Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck | Yoshihiro Watanabe | 2011-09-27 |
| 7881036 | Electrode sheet for electrostatic chuck, and electrostatic chuck | Hiroshi Fujisawa | 2011-02-01 |
| 7567421 | Bipolar electrostatic chuck | — | 2009-07-28 |
| 7411773 | Electrostatic chucking device and manufacturing method thereof | Yoshiaki Tatsumi | 2008-08-12 |
| 7300707 | Aluminium composite structure having a channel therein and method of manufacturing the same | Yoshiaki Tatsumi | 2007-11-27 |
| 6813134 | Electrostatic chucking device and manufacturing method thereof | Yoshiaki Tatsumi | 2004-11-02 |
| 5981913 | Static electricity chuck and wafer stage | Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Seiichirou Miyata, Yoshiaki Tatsumi | 1999-11-09 |
| 5968273 | Wafer stage for manufacturing a semiconductor device | Shingo Kadomura, Tomohide Jozaki, Shinsuke Hirano, Yoshiaki Tatsumi, Seiichirou Miyata | 1999-10-19 |
| 5667822 | Shaping mold for making ultra-thin shaped rubber articles | Tomoyuki Hayashi, Yoshiaki Tatsumi | 1997-09-16 |
| 5595704 | Method of using a shaping mold for making ultra-thin shaped rubber articles | Tomoyuki Hayashi, Yoshiaki Tatsumi | 1997-01-21 |