Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518184 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition | Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2013-08-27 |
| 8384192 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer +2 more | 2013-02-26 |
| 8030170 | Methods of forming isolation structures, and methods of forming nonvolatile memory | Yunjun Ho, Matt Meyers, Gregory J. Light | 2011-10-04 |
| 8017470 | Method of forming a structure over a semiconductor substrate | John T. Moore | 2011-09-13 |
| 7919829 | Liner for shallow trench isolation | Jigish Trivedi, Robert D. Patraw, John Smythe | 2011-04-05 |
| 7906393 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer +2 more | 2011-03-15 |
| 7803678 | Method of forming a structure over a semiconductor substrate | John T. Moore | 2010-09-28 |
| 7771537 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition | Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2010-08-10 |
| 7651910 | Methods of forming programmable memory devices | Ronald A. Weimer | 2010-01-26 |
| 7647886 | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers | David J. Kubista, Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping +2 more | 2010-01-19 |
| 7514366 | Methods for forming shallow trench isolation | Jigish Trivedi, Robert D. Patraw, John Smythe | 2009-04-07 |
| 7422635 | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer +2 more | 2008-09-09 |
| 7399714 | Method of forming a structure over a semiconductor substrate | John T. Moore | 2008-07-15 |
| 7371647 | Methods of forming transistors | John T. Moore | 2008-05-13 |
| 7344755 | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers | Ronald A. Weimer, Lyle Breiner, Er-Xuan Ping, Trung T. Doan, Cem Basceri +2 more | 2008-03-18 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Lyle Breiner, Lingyi A. Zheng +3 more | 2007-10-09 |
| 7271464 | Liner for shallow trench isolation | Jigish Trivedi, Robert D. Patraw, John Smythe | 2007-09-18 |
| 7258892 | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | Trung T. Doan, Lyle Breiner, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2007-08-21 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Lyle Breiner, Er-Xuan Ping, Ronald A. Weimer +2 more | 2007-06-26 |
| 7153736 | Methods of forming capacitors and methods of forming capacitor dielectric layers | Denise M. Eppich | 2006-12-26 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Lyle Breiner, Lingyi A. Zheng +3 more | 2006-06-06 |
| 6815372 | Sputtered insulating layer for wordline stacks | — | 2004-11-09 |
| 6746937 | PD-SOI substrate with suppressed floating body effect and method for its fabrication | — | 2004-06-08 |
| 6734062 | Methods of forming DRAM cells | Fernando Gonzalez, John T. Moore, Ron Weimer | 2004-05-11 |
| 6723599 | Methods of forming capacitors and methods of forming capacitor dielectric layers | Denise M. Eppich | 2004-04-20 |