Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129543 | Epitaxial growth apparatus and method of producing epitaxial wafer | Haku KOMORI | 2024-10-29 |
| 11984346 | Susceptor, epitaxial growth apparatus, method of producing epitaxial silicon wafer, and epitaxial silicon wafer | — | 2024-05-14 |
| 11846039 | Vapor deposition device and method for manufacturing epitaxial silicon wafer | Masayuki Tsuji, Haku KOMORI | 2023-12-19 |
| 11501996 | Susceptor, epitaxial growth apparatus, method of producing epitaxial silicon wafer, and epitaxial silicon wafer | — | 2022-11-15 |
| 9758871 | Method and apparatus for manufacturing epitaxial silicon wafer | — | 2017-09-12 |
| 9685315 | Method of producing epitaxial wafer and the epitaxial wafer having a highly flat rear surface | Sumihisa Masuda | 2017-06-20 |
| 9631297 | Method of producing epitaxial silicon wafer and epitaxial silicon wafer | Sumihisa Masuda | 2017-04-25 |
| 8888913 | Method of manufacturing epitaxial silicon wafer and apparatus therefor | Hirotaka Kato, Koichiro Hayashida | 2014-11-18 |
| 8530801 | Method and apparatus for manufacturing semiconductor wafer | Yuichi Nasu, Hirotaka Katou, Hideyuki Matsunaga | 2013-09-10 |
| 8372196 | Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial wafer | Motonori Nakamura, Yoshinobu Mori, Takeshi Masuda, Hidenori Kobayashi | 2013-02-12 |
| 8021484 | Method of manufacturing epitaxial silicon wafer and apparatus therefor | Hirotaka Kato, Koichiro Hayashida | 2011-09-20 |
| 7993452 | Method of manufacturing epitaxial silicon wafer | Koichiro Hayashida, Hirotaka Kato | 2011-08-09 |
| 7537658 | Method for producing epitaxial silicon wafer | Yuichi Nasu | 2009-05-26 |