Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8888913 | Method of manufacturing epitaxial silicon wafer and apparatus therefor | Kazuhiro Narahara, Hirotaka Kato | 2014-11-18 |
| 8021484 | Method of manufacturing epitaxial silicon wafer and apparatus therefor | Kazuhiro Narahara, Hirotaka Kato | 2011-09-20 |
| 7993452 | Method of manufacturing epitaxial silicon wafer | Kazuhiro Narahara, Hirotaka Kato | 2011-08-09 |