Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406863 | Wafer separation apparatus and method, and method for manufacturing silicon wafer | Tomohiro Hashii, Tsukasa Yoshihara, Yasunori Yoshioka, Kawahito Shinichi | 2025-09-02 |
| 9685315 | Method of producing epitaxial wafer and the epitaxial wafer having a highly flat rear surface | Kazuhiro Narahara | 2017-06-20 |
| 9631297 | Method of producing epitaxial silicon wafer and epitaxial silicon wafer | Kazuhiro Narahara | 2017-04-25 |
| 8952496 | Semiconductor wafer and method of producing same | — | 2015-02-10 |
| 8772177 | Semiconductor wafer and method of producing the same | — | 2014-07-08 |
| 6465328 | Semiconductor wafer manufacturing method | Tomohiro Hashii, Kazunori Onizaki | 2002-10-15 |
| 6211088 | Manufacturing method for semiconductor gas-phase epitaxial wafer | Masato Sakai | 2001-04-03 |