Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129543 | Epitaxial growth apparatus and method of producing epitaxial wafer | Kazuhiro Narahara | 2024-10-29 |
| 11846039 | Vapor deposition device and method for manufacturing epitaxial silicon wafer | Kazuhiro Narahara, Masayuki Tsuji | 2023-12-19 |
| 10975495 | Epitaxial growth apparatus, preheat ring, and method of manufacturing epitaxial wafer using these | — | 2021-04-13 |