Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8747608 | Plasma processing apparatus | Tatehito Usui, Takashi Fujii | 2014-06-10 |
| 8088247 | Plasma processing apparatus | Tatehito Usui, Takashi Fujii | 2012-01-03 |
| 6941185 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-09-06 |
| 6885906 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-04-26 |
| 6853872 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2005-02-08 |
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |
| 6069096 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2000-05-30 |