Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025911 | Reflective structure, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2024-07-02 |
| 11899356 | Reflective film coated substrate, mask blank, reflective mask, and semiconductor device manufacturing method | Takashi Uchida | 2024-02-13 |
| 11681214 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tsutomu Shoki | 2023-06-20 |
| 11500281 | Reflective film coated substrate, mask blank, reflective mask, and semiconductor device manufacturing method | Takashi Uchida | 2022-11-15 |
| 11281090 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki, Yohei IKEBE | 2022-03-22 |
| 11262647 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Tsutomu Shoki | 2022-03-01 |
| 11131921 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Yohei IKEBE | 2021-09-28 |
| 10996554 | Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Takumi Kobayashi, Tatsuo Asakawa, Tsutomu Shoki | 2021-05-04 |
| 10642149 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2020-05-05 |
| 10620527 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2020-04-14 |
| 10606166 | Substrate with electrically conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Takumi Kobayashi, Tatsuo Asakawa, Tsutomu Shoki | 2020-03-31 |
| 10527927 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2020-01-07 |
| 10429728 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-10-01 |
| 10394113 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2019-08-27 |
| 10295900 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2019-05-21 |
| 10209614 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2019-02-19 |
| 10191365 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2019-01-29 |
| 10175394 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Toshihiko Orihara | 2019-01-08 |
| 10126641 | Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask | Tsutomu Shoki | 2018-11-13 |
| 10067419 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Tsutomu Shoki, Yohei IKEBE | 2018-09-04 |
| 10025176 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Toshihiko Orihara, Tsutomu Shoki, Junichi Horikawa | 2018-07-17 |
| 10001699 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2018-06-19 |
| 9897909 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2018-02-20 |
| 9798050 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Toshihiko Orihara | 2017-10-24 |
| 9746762 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2017-08-29 |