Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8691087 | Filtration apparatus | Shuichi Mogi | 2014-04-08 |
| 8513140 | Post-dry etching cleaning liquid composition and process for fabricating semiconductor device | Masafumi Muramatsu, Yukino Hagino, Atsushi Okuyama, Takahito Nakajima, Kazuhiko Takase +4 more | 2013-08-20 |
| 7682463 | Resist stripping method and resist stripping apparatus | Atsushi Okuyama, Yoshio Okamoto, Yuji Sugahara | 2010-03-23 |
| 7341827 | Separation-material composition for photo-resist and manufacturing method of semiconductor device | Masafumi Muramatsu, Hayato Iwamoto, Tomoko Suzuki, Toshitaka Hiraga, Tetsuo Aoyama | 2008-03-11 |
| 6815289 | Method of manufacturing semiconductor device | Tomoyuki Hirano | 2004-11-09 |
| 6158141 | Apparatus and method for drying semiconductor substrate | Hayato Iwamoto, Teruomi Minami | 2000-12-12 |