| 6682399 |
Pressure monitoring system for chemical-mechanical polishing |
Chien-Hsin Lai, Huang-Yi Lin, Kevin Yu |
2004-01-27 |
| 6676801 |
Pressure suppression device for chemical mechanical polishing machine and method thereof |
Chien-Hsin Lai, Huang-Yi Lin, Fu-Yang Yu |
2004-01-13 |
| 6648729 |
Wafer pressure regulation system for polishing machine |
Chien-Hsin Lai, Cheng-Chi Hsieh, Huang-Yi Lin, Fu-Yang Yu |
2003-11-18 |
| 6416615 |
Device for detecting abnormality in chemical-mechanical polishing operation |
Chien-Hsin Lai, Hui-Shen Shih, Huang-Yi Lin |
2002-07-09 |
| 6341995 |
Chemical mechanical polishing apparatus |
Chien-Hsin Lai, Juen-Kuen Lin, Huang-Yi Lin, Kevin Yu |
2002-01-29 |
| 6267654 |
Pad backer for polishing head of chemical mechanical polishing machine |
Chien-Hsin Lai, Huang-Yi Lin, Hui-Shen Shih |
2001-07-31 |