Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337092 | Method of manufacturing semiconductor device | Shuji Kodaira, Yuta SAKAMOTO, Akifumi Sano, Koukichi Kamada, Yoshiyuki Kadokura +3 more | 2016-05-10 |
| 9005413 | Film formation apparatus | Shuji Kodaira, Tomoyuki Yoshihama, Koukichi Kamada, Kazumasa Horita, Shigeo Nakanishi +1 more | 2015-04-14 |
| 8883632 | Manufacturing method and manufacturing apparatus of device | Youhei Endo, Shuji Kodaira, Yuta SAKAMOTO, Yohei Uchida, Yasushi Higuchi +4 more | 2014-11-11 |
| 8834685 | Sputtering apparatus and sputtering method | Naoki Morimoto | 2014-09-16 |