Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446713 | Gas purge unit and load port apparatus | Tadamasa Iwamoto | 2022-09-20 |
| 10512948 | Gas purge unit and gas purge apparatus | Tadamasa Iwamoto | 2019-12-24 |
| 9929033 | Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method | Tadamasa Iwamoto | 2018-03-27 |
| 9833817 | Gas purge unit, load port apparatus, and installation stand for purging container | Mutsuo Sasaki, Hiroshi Igarashi | 2017-12-05 |
| 9786531 | Gas purge unit, load port apparatus, and installation stand for purging container | Mutsuo Sasaki, Hiroshi Igarashi | 2017-10-10 |
| 9543177 | Pod and purge system using the same | Toshihiko Miyajima, Tadamasa Iwamoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Tadamasa Iwamoto, Toshihiko Miyajima, Hidenori TSUTSUI | 2017-01-03 |
| 9349627 | Lid opening/closing system for closed container and substrate processing method using same | Tsutomu Okabe | 2016-05-24 |
| 9153468 | Load port apparatus | Tadamasa Iwamoto, Toshihiko Miyajima | 2015-10-06 |
| 8978718 | Purge device and load port apparatus including the same | Tadamasa Iwamoto, Toshihiko Miyajima | 2015-03-17 |
| 8302637 | Method of processing an object in a container and lid opening/closing system used in the method | Tsutomu Okabe, Tomoshi Abe | 2012-11-06 |
| 8234002 | Closed container and control system for closed container | Tomoshi Abe | 2012-07-31 |
| 7927058 | Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port | Toshihiko Miyajima, Hidetoshi Horibe | 2011-04-19 |
| 7789609 | Lid opening/closing system for closed container and substrate processing method using same | Tsutomu Okabe | 2010-09-07 |
| 7621714 | Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit | Toshihiko Miyajima, Tsutomu Okabe | 2009-11-24 |
| 6795202 | Wafer processing apparatus having wafer mapping function | Takeshi Kagaya, Kazuo Yamazaki | 2004-09-21 |