Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9117668 | PECVD deposition of smooth silicon films | Alice Hollister, Sirish Reddy, Keith Fox, Mandyam Sriram | 2015-08-25 |
| 9028924 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Dong Niu, Keith Fox, John B. Alexy +5 more | 2015-05-12 |
| 8741394 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Dong Niu, Keith Fox, John B. Alexy +5 more | 2014-06-03 |
| 8709551 | Smooth silicon-containing films | Keith Fox, Dong Niu, Mandyam Sriram, George Andrew Antonelli, Bart J. van Schravendijk +1 more | 2014-04-29 |